Contact Us:
(732) 765-0900

Description

High Vacuum Calibration Cart with Automated SNAP Controls & Fyra Displays

The DigiVac EXACT: Mobile Calibration Station

Features

This Multi-Display Mobile Turbo Calibration System by DigiVac is an automated pumping system with integrated standards, valves and Agilent pumps. Easily connect, test, and calibrate vacuum gauges down to 10 -6 Torr. Vent to Atmosphere, or control at any point between .001 to 760 Torr.

Fully integrated with capacitance manometer standards plus high vacuum gauge that reads down to 10 -6 Torr, roughing pump, backing pump and turbo by Agilent, with integrated valves, and DigiVac controls and display.

  • Calibration range: 5 x 10-4 to 1000 Torr
  • Control Range: .001 to 760 Torr
  • Pumping Range: 10 -6 Torr to ATM
  • Fully integrated mobile high vacuum solution with one plug, and one switch to turn it on and off.
  • Safe.  Nothing will be damaged by an operator during normal operation or power outage.
  • With the touch of a button: Vent your system, Isolate your system, apply full vacuum all the way to high vacuum or stabilize at a particular set point at the touch of a button.

Ideal for automating and simplifying vacuum calibration controls.

EXACT Package Details

Vacuum pumping systems, and those systems on vacuum carts are a way that a user can quickly integrate a pumping package on their vacuum chambers.  One of the challenges with many of these pre-packaged systems is that a user still has to install everything, wire everything up, implement valves, consider brown out and power off situations, and train an operator on vacuum system usage.  Turning the wrong valve at the wrong time can lead time costly down time and repair.  The DigiVac solution automates everything.  

The DigiVac simple approach takes care of all of those details in the world’s first complete turnkey integration of a vacuum calibration station with integrated pumping system.  Never before has there been the ability to roll up a vacuum pumping station, plug it in, connect it, and within minutes be controlled at particular pressure.  Now you can.

Integrated Technology:

  • SNAP Vacuum Controller – Automated vacuum measurement and system controls
    • USE: Vacuum Controller to control Roughing and High vacuum pumps
  • Fyra Multi Sensor Vacuum Gauge – Vacuum measurement and calibration validation 
    • USE: Provides simultaneous readouts of the ‘units under test’ and the ‘standards’
  • Brooks Mass Flow Controller – Fine tune flow control when below 150mT
    • USE: for fine control Nitrogen gas
  • Turbo Controller– Powers on/off the 74FS Turbo, controls turbo venting automatically
  • IDP 3 Dry Scroll Pump– Backing pump to properly & safely run a turbo pump
  • IDP 7 Dry Scroll Pump- Roughing pump to initially evacuate the vacuum system
  • Cart Power On/Off Switch– Powers on/off the entire Pump-down System, once plugged in it is ready to use.
  • Gas Regulator– Reads and regulates inert gas flow into the Turbo Pump-System and MFC.  Make sure gas flow stays below 1 PSIG for proper SNAP control performance.

Applications: 

Who would use it ?

    Examples:

  • A manufacturing facility that wants to Validate or calibrate their vacuum gauges while installed on the systems to avoid costly down time required when sending gauges back for NIST certification

SIMPLIFY YOUR LAB & CONTROL MORE WITH LESS


How it works!

The Automated High Vacuum Calibration System consists of several key components that allows the mobile system to be fully automated with the integration of the SNAP vacuum controller and display up to 6 vacuum gauges used for calibration and validation via 2 Fyra Vacuum Controllers.

Standard Fyra

The Standard Fyra on the Left side of the System displays the 3 MKS vacuum gauges: 2, 100, and 1000 Torr. They will be used to validated the “UUT” Fyra’s gauges during calibration and testing.

UUT Fyra

The UUT (Unit Under Test) Fyra on the Right side of the System displays the 3 vacuum gauges: 2, 100, and 1000 Torr. The gauges will be tested and calibrated against the “Standard” Fyra’s gauges

SNAP Vacuum Controller

The SNAP Vacuum Controller is the integrated automated vacuum control instrument that will be running the system via its valving connections and recipe control interface. This will allow the system to adjust setpoints and time duration of the testing procedure to automate the calibration and validation process

Turbo Controller

The Turbo Pump Controller is used in this configuration to power on and off the turbo pump in the system.

MFC

The MFC (Mass Flow Controller) is used in this configuration to control at pressures less than the cross over point of 150mT


The EXACT Mobile Calibration System Includes:

  • (2) Fyra Vacuum Controller | PN: FYRA
    • Total of 6 Active Gauge Cards
    • Additional vacuum valve driver card + 2 Torr Manometer Isolation Valve
  •  (3) MKS 45 degree Heated Capacitance Manometers
    • 2 Torr
    • 100 Torr
    • 1000 Torr
  • SNAP| PN: SNAP-SS
    • High Vacuum Gauge Card + DPCP
    • Additional vacuum valve driver card + Turbo Isolation Valve
  • DPCP | PN: SEN-DPCP-14301127-CER
  • Brooks SLA5850 MFC 
  • IDP7 with isolation valve | PN: PUMP-IDP7-1
  • IDP3 backing pump |PN: PUMP-IDP3B01-Inlet
  • Turbo pump 74FS | PN: X3502-64171
  • Cart 

Alternative Recommendations

The Fyra may be preferred for OEM integrations using machine to machine communication.

For wetter, corrosive or dirty environments, a capacitance manometer may be used.  For higher flow applications a larger Turbo or roughing pump can be used.  To reduce cost, high vacuum diffusion pumps and wet rough pumps can be used instead. If these Alternatives are what you are looking for please fill out the product inquiry for updated quote.


Product Demonstration Video

Introduction to the technology: the EXACT Cart system walkthrough

Downloads

 Operation Manual | Quick Start

For more documentation, please visit DigiVac’s folder.

Technical Specifications

System Overview

Depth of vacuum: 10-6 (limited by use of KF components)

Range of Vacuum: 10-6 to 760 Torr

Range of Control: 1 mt to 760 Torr

External Control options: RS232, USB and Analog

Display: 7”

Sensors: Quantum TriSENSE, 2 Agilent 536

Monitoring locations: Customer vessel, foreline, roughing line

Power off Safety: Yes.  System will not be damaged in the event of a power outage.

Operating Temperature +5°C to +35°C
Power 120V with Nema 5-15 plug (requires 15-amp service connection)
Current 15 Amps
Wheels 4”  Diameter Solid Polyethylene, locking. All four wheels swivel 
Physical Dimensions Standard Shipping
48” x 26” x 36” 52” H x 35” W x 45” D
Weight Standard Shipping
366 lbs 580 lbs
System Connection Type Calibration Manifold with adaptable KF16 native sensor ports. KF40 inlet.
System Crossover Point 150mT
SNAP Vacuum Controller: Vacuum Controller to control Roughing and High vacuum pumps
Accuracy/Control +/- 5% of reading
Time to convergence within 5% after disturbance <30 seconds
Vacuum Path Orifice minimum orifice of 20 mm
Minimum Bleed Valve Orifice 10 mm
Vacuum Connection KF25
PID  P=0.500 I=0.300 D=0.00
SNAP External Sensor: DPCP
Measuring range 7.5×10-5 to 1000 Torr
Measuring principle 1×10-6 to 1×10-3 mbar MEMS Pirani thermal conductivity
Measuring principle 6 to 1333 mbar MEMS piezo diaphragm
Measurement Accuracy (Torr) From 7.5×10-5 to 7.5×10-5: 50% From 7.5×10-5 to 7.5×10-3: 20% From 7.5×10-3 to 1000 Torr: 3%
TwisTorr 74FS Turbo Pump
Base pressure <5 x 10-10 mBar < 5.0 x 10-7 Torr if used with KF-type connections.
Pumping Speed 60L/s
Cooling Method Air cooling, Water cooling
Flange Type ISO63
Compression Rate N2 1 x 109
Foreline Flange Size KF 16 NW
Maximum Gas Throughput of N2, Water Cooling 130 sccm
Noise Level 40 dB(A)
IDP 3 Dry Scroll Pump: Backing pump to properly & safely run a turbo pump
Peak Pumping Speed 60 Hz: 60 L/min (3.6 m3 /h) 50 Hz: 50 L/min (3.0 m3 /h)
Base Pressure 3.3 x 10-1 mbar 2.5 x 10-1 Torr
Vacuum Interface KF16
Gas Ballast female, ¼  inch, national pipe thread (shipped with gas ballast port plug installed; 20 µm sintered filter provided)
Noise Level 55 dB(A)
IDP 7 Dry Scroll Pump: Roughing pump to initially evacuate the vacuum system
Peak Pumping Speed 60 Hz: 152 L/min (9.1 m3 /h) 50 Hz: 120 L/min (7.2 m3 /h)
Base Pressure 2.6 x 10-2 mbar 2.0 x 10-2 Torr
Vacuum Interface KF25
Exhaust Connection KF16
Gas Ballast Female, ¼  inch, national pipe thread, (20 µm sintered plug provided)
Noise Level 52 +/- 2 dB (A)
Fyra Vacuum Gauge: Provides simultaneous readouts of the ‘units under test’ and the ‘standards’
Measurement Range 7.5 x 10-6 Torr to 1000 Torr
45 Degree Heated Capacitance Manometers 2 Torr 100 Torr 1000 Torr
Resolution2 0.001% Full Scale
Sensor Accuracy 0.10% of Reading
Temperature Coefficients – Zero 0.002% Full Scale/°C
Temperature Coefficients – Span 0.02% Reading/°C
Warmup Time 2 hours nominal (1 hour stabilization timer for unheated)
Input Power +24 VDC ±10% @ 560 mA

±15 VDC @ 480 mA

Brooks SLA5850 Mass Flow Controller: Used for fine control Nitrogen gas
Max Press 1500 psig [103 BAR]
Max Temperature 149F [65C]
Meter Material 316L SS
Valve Type NC
Valve Seat & O-Ring Viton
Electrical Connection 15-pin, D-Conn
Connection Type FNPT
Fs Flow Rate 100 SCCM

 

Product Inquiry



DigiVac EXACT Cart: Mobile Turbo Calibration System | High Vacuum Calibration Cart with Automated SNAP Controls & Fyra Displays
$100,312.24