Description
FYRA High Vacuum Gauge | Pirani & Capacitive Piezo
7.5×10-5 to 1000 Torr | TriSENS Gauge
This High Vacuum Gauge bundle pairs DigiVac Fyra with the TriSENS DPCP Quantum Sensor, which is a combined pirani, piezo, and capacitance manometer. It measures from 1000 Torr down to 7.5 x 10-5 Torr. The combined usage of the ultra wide range TriSENS DPCP and FYRA can eliminate the use of multiple sensors to interpret processes and data.
Vacuum Science Simplified
- Easy integration into systems
- Capable of driving multiple types of sensors (ex. piezo, thermal, active, passive, and capacitance manometers)
- Has touchscreen and dial interface
- Intuitively display and manage multiple sensors + control points
- Comes standard with:
- 10 Volt DC output for PLC integration
- USB for data download + documentation of vacuum processing data-points
TriSens | DPCP Quantum Sensor
The DigiVac TriSens DPCP Quantum Gauge is an ultra wide range vacuum sensor that combines the novel Quantum pirani with piezo technology to deliver a measurement range of 7.5 x 10 -5 to 1000 Torr. 0-10V output, RS232 and 1 relay included.
This sensor establishes new standards with an all-in-one wide range measurement solution for a wide selection of vacuum applications. This transducer is an overall cost-effective solution with an ultra-wide 9 decade range that includes 5 decades of gas independent measurement. The Digivac TriSENS combines 3 technologies: Quantum Pirani, Capacitance, Piezo into an all-in-one gauge.
Sensor Details:
Measurement Range: 7.5 x 10-5 to 1000 Torr
Accuracy Specifications:
1000 Torr to .001 Torr = +/- 3%
.0001 Torr to 10-5 Torr = +/- 20%
- Combines 3 vacuum technologies: MEMS Pirani, Capacitative Manometer, and Piezo technology
- 0-10V for PLC Input
- All in one high vacuum measurement, process control, and overpressure indication
- Reliable solid-state relay for process control
- Highly accurate direct pressure measurement down to 10 microns (.01 Torr) + high vacuum measurement down to 10-6
- Ultra-wide 9 decade range that includes 5 decades of gas independent measurement
- Integrated baffle helps protect sensor elements from particulate contamination and increases longevity; no ion gauge required
High Vacuum Gauge Advantages
- Deep & wide measuring range of 9 decades delivered by an all-in-one gauge that combines pirani,
capacitance manometer, and piezo technology - 6 decades of gas independent measurement| 5×10-3 to 1333 mbar
- Reliable solid-state relay for process control
- 0-10V for PLC Input
- LED Color Pressure Indicator
- Robust ceramic capacitance diaphragm gauge
- Mountable in any orientation without impact on performance
Applications:
- Mass spectrometers
- Scanning electron microscopes
- Furnace heat treatment
- PVD coating of glass, optics, tools, etc.
- Refrigeration service and manufacturing
- Semiconductor processing
| Measuring Range | 1×10-5 to 1333 mbar (7.5×10-5 to 1000 Torr) | |
| Measuring principle 1×10-5 to 1×10-3 mbar | MEMS Pirani thermal conductivity | |
| Measuring principle 5×10-3 to 3.99 mbar | Capacitance manometer | |
| Measuring principle 6 to 1333 mbar | MEMS piezo diaphragm | |
| Measurement Accuracy (Torr) | ||
| From | To | Accuracy |
| 7.5×10-5 | 7.5×10-4 | 50% |
| 7.5×10-4 | 7.5×10-3 | 20% |
| 7.5×10-3 | 1000 Torr | 3% |
